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應用區分:
阻值/阻抗量測(Sheet
Resistance)/電阻率(Resistivity): CDE
(Auto Mapping) / Jandel
(Manual)
非接觸式阻值量測(Non-contact
Resistivity Tester)
自動式方型面板用四點探針系統
載子生命(Lifetime)週期測試
(Life time Tester)
薄膜厚度量測(Thickness of Thin
Film),n,K值量測
晶圓/ 晶片厚度量測(Wafer Thickness
measurement)
晶圓/ 晶片彎曲度、平坦度量測(
Wafer Bow/ Warp/ Flatness Measurement)
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