Semiconsoft: MProbe Spectroscopic Reflectrometer System

Semiconsoft 公司系統提供非接觸式光學量測的薄膜厚度與 n，k 值的MProbe量測 系統，其原理為光學反射儀(Spectroscopic Reflectometer)，可適用於穿透性或部分吸收性的薄膜，諸如Oxides, Nitrides, Photoresists, Polymers, Semiconductors (Si, aSi, polySi), Compound Semiconductors (AlGaAs, InGaAs, CdTe,CIGS),Hard coatings (SiC, DLC), Polymer coatings (Paralene, PMMA, Polyamides), thin metal films等。另外，儀器體積小，桌上型，可靠度高，組合靈活，可自由搭配，價格合理。

MProbe 一般型錄 / MProbeVis 型錄 / MProbe UVVis 型錄 / MProbe Micro (Microscope)型錄 / MProbe In-Situ 型錄

Accessory and Options: Mapping System 型錄 / In-Line TOS 型錄

其他文章:

1. Measurement of Films on curved surfaces

2. Spectroscopic Reflectance for thin film measurement

3. Thickness Determination of 4H-SiC epitaxial films by Infrared Reflectance